تجزیه و تحلیل نظری یک مکانیزم سنسور گاز موج سطح با استفاده از نانوساختارهای الکترولیتیک دو لایه

A theoretical investigation of the surface acoustic wave (SAW) propagation on a piezoelectric substrate was performed. The elemental theory of acoustoelectrical interactions between SAWs and bi-layer sensor nanostructures is outlined. The analysis of the SAW sensing mechanism was conducted on the basis of the velocity and attenuation changes. Three varying configurations of bi-layer nanostructures: semiconductor – metal, metal – semiconductor, and dielectric – metal, have been considered. The calculations were executed for three different thicknesses of the film layered on the substrate: 50, 250 and 750 nm. Additionally, dispersion effects, i.e. the influence of various SAW wavelengths (8, 80 and 800 μm) for sensing mechanism is discussed. The experimentally achieved data of surface electrical conductivities, construction parameters and acoustoelectrical parameters for the selected single- and bi-layer sensor structures is also presented.