خازن فلزی نانوساختار فلزی ایزولاتور با تیتانیوم آنودایز

This paper presents fabrication and electrical characterization of barrier type TiO2 metal–insulator–metal (MIM) capacitor using anodization. Polarization process, conduction mechanisms, and structural properties are studied in detail. We found that the anodization voltage played a major role in electrical and structural properties of the thin film. The barrier type anodic TiO2 is suggested as a dielectric material for high-performance MIM capacitors.