حسگر تصویر با بزرگ نمایی بالا در تکنولوژی CMOS

This paper presents a stereoscopic image sensor in CMOS technology. An array of microlenses (fabricated with post processing techniques) separates the left and right optical channels to form the stereoscopic image. An array of optical filters tuned to the primary colors allows a multicolor usage. The fill factor is increased by applying the Canon's 1.5 transistor (1.5 T) concept and photodiodes with octagonal shapes for increasing the fill factor. The reflow method applied to the AZ9260 thick photoresist allows the fabrication of microlenses with high reproducibility and low cost.