تحولات اخیر در زنجیره فرایند هیدروژیک سیلیکون صنعتی، امکان بهره وری را تا 22.7٪

This paper focuses on the implementation of partially new, alternative, cost effective and production-feasible process steps as ozone-based cleaning, inline PECVD and screen printing in the Silicon Heterojunction process chain enabling efficiencies up to 22.7%.