مدل برنامه ریزی ابزار با کالیبراسیون برای تولید کننده تجهیزات نیمه هادی

This research is motivated by issues to confront with a manufacturer of semiconductor equipment. In producing semiconductor equipment, the number of tools which sent back to the supplier for calibration is different each month. It causes the production tool shortage problem. In order to avoid the shortage problem, the number of calibrated tools each month should be concerned when scheduling the tool. However, previous researches less consider the capacity of tool supplier calibration in calibration cycle time. This research is mainly to solve the tool reuse after calibration and supplier calibration capacity in calibration cycle time problems. This research is to develop a tool planning model with tool calibration quantity balance monthly. This model balances the calibrated tool quantity every month. Furthermore, the development of heuristic provides an effective way to minimize the number of tools shortage under orders satisfaction.